Liquid Flow Controller
Built upon field proven technology, the Turbo™ Liquid Flow Controller (LFC) 2950 was engineered to pair with MSP Turbo II™ Vaporizers to provide a reliable, high-performance liquid vapor delivery solution for semiconductor thin film deposition processes (including CVD, PECVD, ALD, and MOCVD). The diagram below shows how the LFC fits into the liquid vaporization system MSP offers.
The MSP Turbo™ Liquid Flow Controller provides ultra-fast response time − able to reach ±1% of set point within 300 ms, saving time and money by increasing throughput and reducing waste. Our new LFC also offers best-in-class accuracy, repeatability, and stability − delivering the high precision performance needed for 300 mm microelectronic processes. High accuracy, excellent repeatability and exception stability can reduce chamber/tool variation, allowing more tightly controlled processes leading to better yield.
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The MSP Turbo™ Liquid Flow Controller provides ultra-fast response time − able to reach ±1% of set point within 300 ms, saving time and money by increasing throughput and reducing waste. Our new LFC also offers best-in-class accuracy, repeatability, and stability − delivering the high precision performance needed for 300 mm microelectronic processes. High accuracy, excellent repeatability and exception stability can reduce chamber/tool variation, allowing more tightly controlled processes leading to better yield.
Other Products and Services from TSI Instruments Ltd
OmniTrak Air Quality Meter
TSI OmniTrak™ Solution is a customizable, scalable, and affordable solution enabled by connecting innovative monitoring instruments, intelligent TSI Link™ software and service solutions. This platform solution of connected devices allows you to plan, measure, report, recommend, and monitor key business drivers and risks to help improve health, wellbeing, and efficiency.
Customizable, Scalable, and Affordable Solutions from TSI.
TSI provides a modular designed solution allowing for flexibility and connection to future generation modules for additional surveying capabilities. All connected to our OmniTrak™ Smart Station, each individual module can be wirelessly connected for different testing parameters (up to 10 at a time).
Tailor the solution to fit your needs. Whatever role you take on from industrial hygenist, facility manager, property owner, or a leader in education, indoor environments vary between every building and room. TSI OmniTrak™ Solutions help air quality testing professionals who want to survey various air quality parameters with multiple measurement points and analyze data inputs to create reports by reducing the number of survey instruments needed and avoiding time-consuming manual work to increase their productivity.
Are you tired of spending hours creating reports manually? Enjoy custom reports and smart visualization in a few clicks with TSI Link™ Report Creator. Save time and simplify reporting - with TSI Link™ Report Creator you can automatically generate custom reports that include tables, graphs, additional insights and access user-friendly Excel templates for your studies.
Available modules: Ammonia (NH3), Chlorine (Cl), Ozone (O3), Formaldehyde (HCHO), Carbon Monoxide (CO), Particulate Matter (PM) and VOC-PID (ppm), VOC-PID (ppb), VOC-PID (ppm), Particulate Matter (pm)
Customizable, Scalable, and Affordable Solutions from TSI.
TSI provides a modular designed solution allowing for flexibility and connection to future generation modules for additional surveying capabilities. All connected to our OmniTrak™ Smart Station, each individual module can be wirelessly connected for different testing parameters (up to 10 at a time).
Tailor the solution to fit your needs. Whatever role you take on from industrial hygenist, facility manager, property owner, or a leader in education, indoor environments vary between every building and room. TSI OmniTrak™ Solutions help air quality testing professionals who want to survey various air quality parameters with multiple measurement points and analyze data inputs to create reports by reducing the number of survey instruments needed and avoiding time-consuming manual work to increase their productivity.
Are you tired of spending hours creating reports manually? Enjoy custom reports and smart visualization in a few clicks with TSI Link™ Report Creator. Save time and simplify reporting - with TSI Link™ Report Creator you can automatically generate custom reports that include tables, graphs, additional insights and access user-friendly Excel templates for your studies.
Available modules: Ammonia (NH3), Chlorine (Cl), Ozone (O3), Formaldehyde (HCHO), Carbon Monoxide (CO), Particulate Matter (PM) and VOC-PID (ppm), VOC-PID (ppb), VOC-PID (ppm), Particulate Matter (pm)
Particle Sizers
TSI provides aerosol sizing instruments that expand our understanding of aerosols and lead to breakthroughs in research and a wide range of industries. TSI manufactures particle sizing instrumentation and systems that span the particle size range from 1 nm to 20 micrometers. Our instruments are routinely used around the globe in a variety of applications, including air quality monitoring, aerosol research, engine emissions, exposure studies, and many more.
TSI’s particle sizers provide particle size ranges for a variety of applications, click below to discover how TSI can support your research and measurement needs.
TSI’s particle sizers provide particle size ranges for a variety of applications, click below to discover how TSI can support your research and measurement needs.
Cleanroom Particle Counters
TSI’s cleanroom facility environmental monitoring products with built-in redundancy provide the confidence you need to reliably monitor critical processes and demonstrate compliance. Eliminate waste, interventions and interruptions using TSI:
Facility Monitoring Software (OPC UA Client/Server)
Remote Active Air Sampler
Remote Particle Counters (including new AeroTrak®+ Remote Particle Counters)
Real-Time Viable Particle Counter
Handheld Particle Counters
Portable Particle Counters
Condensation Particle Counter
Facility Monitoring Software (OPC UA Client/Server)
Remote Active Air Sampler
Remote Particle Counters (including new AeroTrak®+ Remote Particle Counters)
Real-Time Viable Particle Counter
Handheld Particle Counters
Portable Particle Counters
Condensation Particle Counter
TSI Instruments Ltd
Stirling Road, Cressex Business Park, High Wycombe, Buckinghamshire, HP12 3ST, United Kingdom
TSI Ltd serves a global market by investigating, identifying & solving measurement problems. As an industry leader in the design & production of precision measurement instruments, TSI partners with research institutions & customers around the world to set the standard for measurements relating to Respirator Fit Testing, aerosol science, air flow, indoor air quality, fluid dynamics and biohazard detection. With headquarters based in the U.S. & field offices throughout Europe & Asia, TSI has established a worldwide presence in the markets we serve.