Liquid Flow Controller
Built upon field proven technology, the Turbo™ Liquid Flow Controller (LFC) 2950 was engineered to pair with MSP Turbo II™ Vaporizers to provide a reliable, high-performance liquid vapor delivery solution for semiconductor thin film deposition processes (including CVD, PECVD, ALD, and MOCVD). The diagram below shows how the LFC fits into the liquid vaporization system MSP offers.
The MSP Turbo™ Liquid Flow Controller provides ultra-fast response time − able to reach ±1% of set point within 300 ms, saving time and money by increasing throughput and reducing waste. Our new LFC also offers best-in-class accuracy, repeatability, and stability − delivering the high precision performance needed for 300 mm microelectronic processes. High accuracy, excellent repeatability and exception stability can reduce chamber/tool variation, allowing more tightly controlled processes leading to better yield.
View Product on Company Website
The MSP Turbo™ Liquid Flow Controller provides ultra-fast response time − able to reach ±1% of set point within 300 ms, saving time and money by increasing throughput and reducing waste. Our new LFC also offers best-in-class accuracy, repeatability, and stability − delivering the high precision performance needed for 300 mm microelectronic processes. High accuracy, excellent repeatability and exception stability can reduce chamber/tool variation, allowing more tightly controlled processes leading to better yield.
Other Products and Services from TSI Instruments Ltd
Abbreviated Impactor Measurement (AIM) Equipment
The Abbreviated Impactor Measurement (AIM) Method implies using a shorter process to characterize aerodynamic size. It has been promoted as an alternative to the labor-intensive full resolution cascade impactor methodology for APSD (aerodynamic particle size distribution) testing.
Using an AIM methodology for early stage development has become increasingly popular as both OINDP device and drug companies look for ways to shorten drug development. This technology has traditionally been limited to early development signals indicating rough drug particle size, and this equipment is still intended to categorize the entire dosage for effective mass balance exercises.
Using an AIM methodology for early stage development has become increasingly popular as both OINDP device and drug companies look for ways to shorten drug development. This technology has traditionally been limited to early development signals indicating rough drug particle size, and this equipment is still intended to categorize the entire dosage for effective mass balance exercises.
Flow Meters, Flow Sensors & Flow Analyzers
For half a century, TSI has earned the reputation as a leader in designing and manufacturing flow measurement instrumentation. TSI mass flow meters, Certifier flow analyzers, and mass flow sensors for gases are used worldwide in laboratory and manufacturing settings, plus embedded applications. Our flow meters, flow analyzers, and embedded flow sensors are optimized for medical applications where accuracy and reliability are key requirements.
Particle Counters & Detectors
Our family of particle counters and particle detectors contain instruments optimized for a variety of applications.
In environmental research and monitoring, customers face high concentrations in city centers, near freeways or harbors, or very low concentrations in remote locations which are used as reference sampling points.
In the laboratory, particle counters are often combined with particle sizers to measure size distributions.
Workplaces, hospitals, schools, residential homes and other sensitive environments prefer water-based Condensation Particle Counters (CPCs) to ensure the occupants’ safety and health.
Combustion aerosol has its own challenges, such as sampling the aerosol without changing it, or following regulatory directives for engine exhaust.
For the purpose of calibration, reference counting is typically performed with an Aerosol Electrometer.
Whatever your challenge is, TSI offers a solution. Let us help you to find yours.
In environmental research and monitoring, customers face high concentrations in city centers, near freeways or harbors, or very low concentrations in remote locations which are used as reference sampling points.
In the laboratory, particle counters are often combined with particle sizers to measure size distributions.
Workplaces, hospitals, schools, residential homes and other sensitive environments prefer water-based Condensation Particle Counters (CPCs) to ensure the occupants’ safety and health.
Combustion aerosol has its own challenges, such as sampling the aerosol without changing it, or following regulatory directives for engine exhaust.
For the purpose of calibration, reference counting is typically performed with an Aerosol Electrometer.
Whatever your challenge is, TSI offers a solution. Let us help you to find yours.
TSI Instruments Ltd
Stirling Road, Cressex Business Park, High Wycombe, Buckinghamshire, HP12 3ST, United Kingdom
TSI Ltd serves a global market by investigating, identifying & solving measurement problems. As an industry leader in the design & production of precision measurement instruments, TSI partners with research institutions & customers around the world to set the standard for measurements relating to Respirator Fit Testing, aerosol science, air flow, indoor air quality, fluid dynamics and biohazard detection. With headquarters based in the U.S. & field offices throughout Europe & Asia, TSI has established a worldwide presence in the markets we serve.