Aerosol & Dust Monitors

TSI’s suite of cascade impactors can collect particles with aerodynamic diameters (cutpoints) from 10 nm to 10 µm, in 3 to 13 different size fractions, and at flow rates of 2, 10, 30 or 100 L/min. The number of stages determines the size resolution of the collected samples, and consequently determines the level of detail of the data generated from the quantitative analysis of these collected samples. MOUDI II impactors have rotating stages. When the stage is rotated relative to the nozzle plate, the impacted particles are deposited in a more uniform manner across the impaction surface. This increases the amount of particle mass that can be collected, reduces the probability of particle bounce and re-entrainment, and optimizes quantitative analysis of the collected samples.

To learn more about TSI’s cascade impactors, take a look at individual offerings or contact a member of TSI’s team today.

Built upon field proven technology, the Turbo™ Liquid Flow Controller (LFC) 2950 was engineered to pair with MSP Turbo II™ Vaporizers to provide a reliable, high-performance liquid vapor delivery solution for semiconductor thin film deposition processes (including CVD, PECVD, ALD, and MOCVD). The diagram below shows how the LFC fits into the liquid vaporization system MSP offers.
The MSP Turbo™ Liquid Flow Controller provides ultra-fast response time − able to reach ±1% of set point within 300 ms, saving time and money by increasing throughput and reducing waste. Our new LFC also offers best-in-class accuracy, repeatability, and stability − delivering the high precision performance needed for 300 mm microelectronic processes. High accuracy, excellent repeatability and exception stability can reduce chamber/tool variation, allowing more tightly controlled processes leading to better yield.

With automation equipment performing repetitive, time-consuming tasks, well-educated scientists and analysts can focus on completing higher-level, value-added work.

Along with freeing up analyst/scientist’s time, automated inhaler testing equipment in the lab provides additional benefits. Some of these benefits include:

Consistency: mechanical processing is always more consistent
Repeatability: automation eliminates large uncontrollable variables for more reliable results
Method transfer: easily prove effective method transfer from lab to lab, site to site, CRO to manufacturing, and analyst to analyst
Clarity: improves troubleshooting with less input variables into method and therefore analysis clarity
Cost: decreases long term cost of errors and troubleshooting