Aerosol & Dust Monitors

MSP is now on the TSI website! In 2016, MSP became a Division of TSI, and has now officially moved to the TSI website. Please explore all the new pages, and leave us a comment at the bottom of this page!

Since MSP's founding in 1985, one of our core focuses has always been industry research. Our products can be separated into Pharmaceutical Inhaler Device Testing and Semiconductor Manufacturing (Liquid Source Vaporization Solutions and Surface Defect Inspection/Metrology).

You can find some of our product pages at the links below!

Built upon field proven technology, the Turbo™ Liquid Flow Controller (LFC) 2950 was engineered to pair with MSP Turbo II™ Vaporizers to provide a reliable, high-performance liquid vapor delivery solution for semiconductor thin film deposition processes (including CVD, PECVD, ALD, and MOCVD). The diagram below shows how the LFC fits into the liquid vaporization system MSP offers.
The MSP Turbo™ Liquid Flow Controller provides ultra-fast response time − able to reach ±1% of set point within 300 ms, saving time and money by increasing throughput and reducing waste. Our new LFC also offers best-in-class accuracy, repeatability, and stability − delivering the high precision performance needed for 300 mm microelectronic processes. High accuracy, excellent repeatability and exception stability can reduce chamber/tool variation, allowing more tightly controlled processes leading to better yield.

See the latest from TSI

Some TSI instruments will help answer research questions or provide compliance data. Others will enable manufacturing improvements or help companies protect their workers with precise measurements of air quality, respirator fit, dust exposure or other safety factor.
Our engineers are continuously innovating, developing, and improving. See the latest products and solutions from TSI.