Laboratory Monitors & Controls

The USP and FDA provide blueprints for many methods and monographs to assist in accelerating regulatory acceptance.

To name just a few, there are well known and accepted generics for albuterol, fluticasone propionate, Salmeterol, or combinations. Another recent generic draft guidance from the FDA is Beclomethasone Dipropionate, utilizing an IVIVC approach.

There are also unique testing aspects to OINDPs that are outside of the focus of APSD and DDU tests. MSP, a Division of TSI, carries a full equipment set to perform dissolution testing, gravimetric testing, spray force testing, and testing the “cold Freon” effect. These types of products are also featured in the Copley Catalog.

TSI’s cleanroom facility environmental monitoring products with built-in redundancy provide the confidence you need to reliably monitor critical processes and demonstrate compliance. Eliminate waste, interventions and interruptions using TSI:

Facility Monitoring Software (OPC UA Client/Server)
Remote Active Air Sampler
Remote Particle Counters (including new AeroTrak®+ Remote Particle Counters)
Real-Time Viable Particle Counter
Handheld Particle Counters
Portable Particle Counters
Condensation Particle Counter

Built upon field proven technology, the Turbo™ Liquid Flow Controller (LFC) 2950 was engineered to pair with MSP Turbo II™ Vaporizers to provide a reliable, high-performance liquid vapor delivery solution for semiconductor thin film deposition processes (including CVD, PECVD, ALD, and MOCVD). The diagram below shows how the LFC fits into the liquid vaporization system MSP offers.
The MSP Turbo™ Liquid Flow Controller provides ultra-fast response time − able to reach ±1% of set point within 300 ms, saving time and money by increasing throughput and reducing waste. Our new LFC also offers best-in-class accuracy, repeatability, and stability − delivering the high precision performance needed for 300 mm microelectronic processes. High accuracy, excellent repeatability and exception stability can reduce chamber/tool variation, allowing more tightly controlled processes leading to better yield.